ALUMINUM NITRIDE FILMS
C-axis oriented aluminum nitride (AlN) films are realized by using a magnetron sputtering system. Piezoelectric transducers based on AlN are investigated.
PIEZOELECTRIC ENERGY HARVESTERS
Investigations are performed by using a cantilever beam test configuration.
ELECTRICAL CHARACTERIZATION OF MATERIALS
A coaxial specimen holder has been developed for the measurement of the shielding effectiveness of a planar thin film.
